Modeling of the behavior of sensing elements in thermo-electro-mechanical converters

The methods for modeling the behavior of thermo-electro-mechanical converters used for measuring radiation in the terahertz frequency range are developed. The design of such converters is very important for creating new security systems and medical devices using penetrating THz radiation for the analysis of the state of the objects under consideration. The development of sensing elements for THz-radiation converters requires the development of new methods for the analysis of coupled physical processes that are typical for them. The models of MEM sensing elements allowing for field emission effects and thermal and mechanical stationary external fields are proposed. A solution is obtained for a coupled multiphysics nonlinear problem taking into account the mutual influence of the field emission current and electrostatic forces. The proposed approach makes it possible to obtain the performance characteristics of sensing elements and estimate the influence of nonlinear factors and parasitic effects.

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