High-vacuum pumping of directed gas flows

Authors: Demihov K.E., Nikulin N.K.	Published: 16.09.2013
Published in issue: #11(620)/2011
DOI: 10.18698/0536-1044-2011-11-28-32
Category: Transportation and Power Engineering
Keywords: directed flow, cryoadsorbtion pump, mechanical pump, molecular flows density, distribution, highvacuum system

The paper deals with highvacuum pumping of directed gas flows by means of cryoadsorbtion, electrical and mechanical pumping.