Mathematical Modeling of Heat Transfer During Chemical Vapor Deposition

A heat conductivity model is proposed that takes into account physical features of heat exchange of a plate with vapors of the deposited material. The most general case of a curvilinear plate is considered. Heat transfer by convection and radiation, as well as heat and mass transfer are examined. The possibility of modifying the mathematical model in order to take into account diffusion mass transfer and linear changes of the curvature with regards to the plate thickness is shown. A numerical algorithm for solving the problem is proposed. Calculations for various materials of the plate-coating pairs are performed. Conclusions are drawn about the dependence of the temperature field in the plate on the plate geometry, parameters of deposition and material properties.

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