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Investigation of opportunities to optimize pumping performance of molecular-viscous vacuum pump by statistical simulation methods
| Authors: Demihov K.E., Nikulin N.K., Dronova T.V. | Published: 04.11.2013 |
| Published in issue: #11(632)/2012 | |
| Category: Calculation and Design of Machinery | |
| Keywords: statistical method, molecule, molecular-viscous pump, transition probability, pressure ratio, operating speed, pressure, geometrical parameters, channel shape |
The paper deals with the influence of system main parameters — the pumping system geometry and the gas flow dynamics — on the pumping characteristics of the pump. The method of calculating the probability for a particle to pass the channel by Monte Carlo method taking into account the time of a particle movement in the channel is described. The influence of the parameters is considered in relation to work in high vacuum.