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Investigation of opportunities to optimize pumping performance of molecular-viscous vacuum pump by statistical simulation methods
| Authors: Demihov K.E., Nikulin N.K., Dronova T.V. | Published: 04.11.2013 |
| Published in issue: #11(632)/2012 | |
| Category: Calculation and Design of Machinery | |
| Keywords: statistical method, molecule, molecular-viscous pump, transition probability, pressure ratio, operating speed, pressure, geometrical parameters, channel shape |