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Study of the backward flow in Roots-type vacuum pump with elliptical rotor profile in the gas flow molecular regime

Authors: Isaev A.A., Raykov A.A., Burmistrov A.V., Salikeev S.I.	Published: 23.03.2023
Published in issue: #4(757)/2023
DOI: 10.18698/0536-1044-2023-4-38-45
Category: Mechanical Engineering and Machine Science \| Chapter: Hydraulic Machines, Vacuum, Compressor Technology, Hydraulic and Pneumatic Systems
Keywords: two-rotor vacuum pump, elliptical profile, flow molecular regime, slot channel conductivity