Kinematic and stress analysis of a parallel structure mechanism with the elastic hinges

The paper considers a mechanism with three kinematic chains developed using the elastic hinges. This design feature provides that friction, backlash and noise are missing, and no lubrication is required. The mechanism ensures high positioning accuracy of the output link, which has three degrees of freedom, i.e. motion along the two mutually perpendicular axes in a plane and rotation around an axis perpendicular to this plane. The mechanism was structurally analyzed. Based on the linearized approach, the direct and inverse position problems were solved. The mechanism was numerically simulated in the ANSYS software package taking into account contacts in the translational pairs. Theoretical results obtained are making it possible to clarify the relationship between the output and input links motion and connection of these motions with the structure geometric characteristics, as well as to assess stress-strain state of the elastic hinges. The data obtained could further be used to create a methodology for synthesizing the mechanisms with elastic hinges that perform the submicron displacement.
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References

[1] Orlov A.V., Glazunov V.A., Aleshin A.K. et al. Manipulyator dlya submikronnykh peremeshcheniy [Manipulator for submicron displacements]. Patent RU 2679260. Appl. 17.04.2018, publ. 06.02.2019. (In Russ.).

[2] Fomin A.S., Skvortsov P.A., Antonov A.V. Trekhpodvizhnyy ploskiy mekhanizm parallelnoy struktury [Three-axis flat mechanism of parallel structure]. Patent RU 2808492. Appl. 21.03.2023, publ. 28.11.2023. (In Russ.).

[3] Fomin A.S., Antonov A.V., Skvortsov P.A. et al. Trekhkoordinatnyy ploskiy manipulyator parallelnoy struktury [Three-axis flat manipulator of parallel structure]. Patent RU 2809101. Appl. 21.03.2023, publ. 06.12.2023. (In Russ.).

[4] Glazunov V.A., Kheylo S.V., eds. Mekhanizmy perspektivnykh robototekhnicheskikh system [Mechanisms of prospective robotic systems]. Moskva, Tekhnosfera Publ., 2021. 296 p. (In Russ.).

[5] Glazunov V.A., Orlov A.V., Skvortsov P.A. Rational design of a micro-positioner with elastic hinges. Asian MMS 2021. Springer, 2022, pp. 22–30, doi: https://doi.org/10.1007/978-3-030-91892-7_3

[6] Chen G., Ma Y., Li J. A tensural displacement amplifier employing elliptic-arc flexure hinges. Sens. Actuator A Phys., 2016, vol. 247, pp. 307–315, doi: https://doi.org/10.1016/j.sna.2016.05.015

[7] Chen W., Lu Q., Kong C. et al. Design, analysis and validation of the bridge-type displacement amplification mechanism with circular-axis leaf-type flexure hinges for micro-grasping system. Microsyst. Technol., 2019, vol. 25, no. 3, pp. 1121–1128, doi: https://doi.org/10.1007/s00542-018-4064-2

[8] Zentner L., Strehle S., eds. Microactuators, microsensors and micromechanisms. MAMM 2020. Springer, 2021. 149 p.

[9] Aljodah A., Shirinzadeh B., Ghafarian M. Development and analysis of a novel large range voice coil motor-driven 3-DOF XY? micro-positioning mechanism. MARSS, 2019, doi: https://doi.org/10.1109/MARSS.2019.8860951

[10] Chen X., Li Y. Design and analysis of a new high precision decoupled XY compact parallel micromanipulator. Micromachines, 2017, vol. 8, no. 3, art. 82, doi: https://doi.org/10.3390/mi8030082

[11] Tian Y., Shirinzadeh B., Zhang D. Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation. Microelectron. Eng., 2010, vol. 87, no. 2, pp. 230–241, doi: https://doi.org/10.1016/j.mee.2009.08.001

[12] Zhan Z., Zhang Z., Zhao B. et al. Clearance-induced position uncertainty estimation and experimental verification of a planar parallel manipulator. IFToMM WC 2023. Springer, 2023, pp. 692–702, doi: https://doi.org/10.1007/978-3-031-45705-0_67

[13] Lavanya S.B., Jayanth G.R., Mohanty A.K. Optimal design of bridge amplifiers for large-range linear characteristics. IFToMM WC 2023. Springer, 2023, pp. 721–730, doi: https://doi.org/10.1007/978-3-031-45705-0_70

[14] Lin P.Y., Ke C.H., Wang D.Y. et al. Numerical study of a piezoelectric xy-stage with diamond-type displacement amplification mechanism. IFToMM WC 2023. Springer, 2023, pp. 167–175, doi: https://doi.org/10.1007/978-3-031-45770-8_17

[15] Pilkey W.D. Peterson’s stress concentration factors. Wiley, 1997. 508 p.

[16] Linß S., Henning S., Zentner L. Modeling and design of flexure hinge-based compliant mechanisms. In: Kinematics — analysis and applications. IntechOpen, 2019, doi: https://doi.org/10.5772/intechopen.85224

[17] Chen G., Shao X., Huang X. A new generalized model for elliptical arc flexure hinges. Rev. Sci. Instrum., 2008, vol. 79, no. 9, art. 095103, doi: https://doi.org/10.1063/1.2976756

[18] Pinskier J., Shirinzadeh B., Ghafarian M. et al. Topology optimization of stiffness constrained flexure-hinges for precision and range maximization. Mech. Mach. Theory, 2020, vol. 150, art. 103874, doi: https://doi.org/10.1016/j.mechmachtheory.2020.103874