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The Influence of Magnetron Sputtering Conditions on the Structure of Heat Resistant ZrO2 Nanostructured Coatings
Authors: Valyukhov S.G., Stognei O.V., Filatov M.S. | Published: 20.11.2015 |
Published in issue: #11(668)/2015 | |
Category: Aviation, Rocket and Technology | |
Keywords: RF-magnetron sputtering, nanostructured films, stabilized zirconia dioxide, thermal annealing |