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An Analysis of Destructive Methods of Thin Films Thickness Measurement
| Authors: Shupenev A.E., Pankova N.S., Korshunov I.S., Grigoriyants A.G. | Published: 12.03.2019 |
| Published in issue: #3(708)/2019 | |
| Category: Mechanical Engineering and Machine Science | Chapter: Machine Science | |
| Keywords: thin films thickness, bevel cut method, spherical cut method, stylus profilometry, atomic-force microscopy |
