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An Analysis of Non-Destructive Methods for Thin Film Thickness Measurement
| Authors: Shupenev A.E., Pankova N.S., Korshunov I.S., Grigoriyants A.G. | Published: 15.04.2019 |
| Published in issue: #4(709)/2019 | |
| Category: Mechanical Engineering and Machine Science | Chapter: Methods and Devices for Monitoring and Diagnosing Materials, Products, Substances | |
| Keywords: thin film thickness, in situ methods, reflection high-energy electron diffraction, multiple-beam interferometry, gravimetric method |
