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Two-sided abrasive lapping of wafers taking into account laps wear
| Authors: Chizhov A.S. | Published: 16.09.2013 |
| Published in issue: #11(620)/2011 | |
| Category: Technology and Process Machines | |
| Keywords: two sided lapping, monocrystal wafer, elastic deformation, abrasive treatment, tool wear, holder, laps dressing |