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To the Question of Temperature Effect on the Resistivity Uniformity of Silicon Carbide Substrates
| Authors: Viyuginov V.N., Gudkov A.G., Shashurin V.D. | Published: 09.06.2016 |
| Published in issue: #6(675)/2016 | |
| Category: Technology and Process Machines | |
| Keywords: silicon carbide, electrical properties, substrate, semiconductor, resistivity, thermal effects, single crystal |
Noname
| Authors: MESHKOVSKIY V.E. | Published: 13.11.2014 |
| Published in issue: #11(656)/2014 | |
| Category: Calculation and Design of Machinery | |
| Keywords: large space structures, truss space antenna, thermal effects, temperature field, thermal deformation, root-mean-square deviation. |