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To the Question of Temperature Effect on the Resistivity Uniformity of Silicon Carbide Substrates
| Authors: Viyuginov V.N., Gudkov A.G., Shashurin V.D. | Published: 09.06.2016 |
| Published in issue: #6(675)/2016 | |
| Category: Technology and Process Machines | |
| Keywords: silicon carbide, electrical properties, substrate, semiconductor, resistivity, thermal effects, single crystal |
